DESCRIPTION 

The course provides an overview of the microprocessing - and indeed nanoprocessing - of materials as used in the fabrication of ultrathin layers and structures of materials for use in semiconductors and other devices based on thin film fabrication.  Key processes are explored with respect to their underlying chemistry and physics, the relation of these processes to resulting materials properties and microscale/nanoscale topography, the manufacturing equipment used to achieve success microprocessing, and fundamental interactions between process steps which determine the performance of micrstructures and nanostructures.  Simulation exercises and research projects provide an opportunity to explore key concepts in the course, to develop useful modeling skills,  and to actively pursue a research question in a team setting.  The student will (1) develop skills in identifying, understanding, and exploiting fundamental mechanisms in microprocesses, and (2) gain a meaningful perspective on how this understanding can be used in industrial applications of microprocessing as employed in technologies for silicon ULSI, compound semiconductors, optoelectronics, displays, data storage, and microelectromechanical systems.