Dr. Gary W. Rubloff
Home
Research Topics
Process diagnostics, sensing, metrology, and control
Semiconductor manufacturing processes and equipment
Systems modeling, simulation, and optimization
Engineered learning systems

Recent Results

Publications
Presentations

Teaching

Current class
Experience

Other

Facilities
Research group
CV
Connections

Contacts & maps

Collaborations

Collaborators' corner
Internal-group
External-restricted
 

Other:
Consumer reports

Counter by digits.com

All materials at this site are copyrighted 2003 by the University of Maryland
1996-2003, all rights reserved

Current & Former Group Members and Collaborators

CURRENT 
Name Current Position Research Projects Background
Gary W. Rubloff Professor, Dept. of Materials & Nuclear Engineering and the Institute for Systems Research Semiconductor processing, sensing, optimization, and control; engineered learning systems PhD, Physics, U. Chicago Postdoc, Physics, Brown U. IBM Research, Yorktown Hts, NY Ctr. For Adv. El. Mat's. Proc., N.C. State Univ.
Laurent Henn-Lecordier Research engineer & LAMP Lab Manager, ISR, U. Maryland Semiconductor processing, sensing, optimization, and control MS Materials Eng., Inst. of Science and Technology, Grenoble, France
Anne Rose Manager, Human-Computer Interactions Lab, U. Maryland Engineered learning systems MS, Industrial Eng., Penn State
Soon Cho PhD student, Materials Science & Engineering Semiconductor process sensing, metrology, & control; GaN MOCVD (Northrop Grumman)  BS, Materials Science & Engineering, U. Maryland 
Lei, Wei PhD student, Materials Science & Engineering Atomic layer deposition and CVD process & metrology for advanced interconnects  
Park, Jung Jin PhD student, Materials Science & Engineering Biomaterials & bioMEMS;
low-K dielectrics
 
Cai, JoAnn PhD student, Materials Science & Engineering Atomic layer deposition and CVD process & metrology for advanced interconnects  
Valentine, Theresa BS/MS student, Materials Science & Engineering Biomaterials and bioMEMS Undergraduate, Materials Science & Engineering, U. Maryland
Moore, Philip BS student, Computer Science Engineered learning systems Undergraduate, Computer Science, U. Maryland
Melvin, Adam BS student, ChE, U. Arizona
and REU UMD 2002
Simulation and environmental impact in semiconductor manufacturing Undergraduate, Chemical Engineering, U. Arizona
 
FORMER
Name Current or 
Subsequent Position
Former Position in Group Background
Yijun Liu ASM America Postdoc NIST / ISR
University of Maryland
Senior Research Supervisor, Tokyo Electron Ltd; PhD Chem. Syst. Eng., U. Tokyo
Yiheng Xu IBM Microelectronics, Hopewell Junction, NY PhD, MSE, semiconductor process sensing and control PhD, Materials, U. Maryland; MS, MSE, CSUT, China
Brian Conaghan Intel, Massachusetts MS, ECE, semiconductor manufacturing simulation and optimization BS, Chemical Eng., Cornell
David Green Axcelis Technologies, Bethesda MD Research Associate, NIST/ISR  
Ben Levy Mitre Corporation, McLean, VA Postdoc, engineered learning systems Postdoc, U. Maryland; PhD, Civil Eng., U.Maryland
Mark Kastantin Undergraduate, ECE, MIT NSF REU 2001  
Eric Weisman Undergraduate, ChE, U. Arizona NSF REU 2000  
Ramaswamy Sreenivasan Applied Materials MS, 2000, Chemical Engineering University of Maryland MS, Chemical Engineering
Theodosia Gougousi North Carolina State University Postdoc NIST / ISR
University of Maryland
Postdoc, NCSU; PhD Physics, Univ. of Pittsburg
Sunjun Park Graduate Student, Computer Science NSF REU 1999 BS, Computer Science, NCSU
Zhiping Shi PhD student, University of Maryland MS, 1999, Electrical Engineering University of Maryland MS, Electrical Engineering
Nayanee Gupta Intel Corporation MS, 1999 Materials Engineering University of Maryland MS, Materials Engineering
Yatin Sankholkar   MBA, engineered learning systems Business
John Kidder Assistant Professor,  Vermont Technical College Asst Prof, UMD Materials
Postdoc ISR/MNE, chemical sensing and control
PhD, MSE Dept., U. Washington
Mansour Oveissi Instructor, University of Maryland University College Staff, engineered learning systems Information systems
Guangquan (Brian) Lu Novellus Systems Postdoc Center for Adv. El. Mat's. Proc. North Carolina State University Postdoc, Chemistry, U. Pittsburgh PhD, Chemistry U. Calif. San Diego
Laura L. Tedder Asst. Dir. For Education NSF ERC, U. Colo. Boulder Postdoc Center for Adv. El. Mat's. Proc. North Carolina State University PhD, Chemistry U. Calif. San Diego
David Eckard Alcatel Corporation BS, ECE, North Carolina State University  
Nabil Rabbani Intel Corporation MS, 1996 Electrical and Computer Engineering North Carolina State University MS, ECE Dept. North Carolina State U.
Peter Joshua Wolf Intel Corporation MS, 1996 Materials Science and Engineering North Carolina State University BS, MSE Dept. North Carolina State U.
Monalisa Bora Actel Corporation MS, 1996 Electrical and Computer Engineering North Carolina State University  
Iqbal Shareef Novellus Systems PhD, 1994 Chemical Engineering Rensselaer Polytechnic Institute MS, Mechanical Eng. IBM, engineer
 
COLLABORATORS 
Name Current Position Collaborative Research Projects
Ray Adomaitis Associate Professor, Dept. of Chemical Engineering, Inst. for Systems Research, U. Maryland Semiconductor process control; programmable reactor design
Reza Ghodssi Assistant Professor, Electrical and Computer Engineering and Institute for Systems Research, U. Maryland BioMEMS and electronic materials fabrication
Rob Briber Associate Professor, Materials Science and Engineering, U. Maryland Nanoporous low-K dielectrics
William Bentley Professor, Herb Rabin Chair,  Chemical Engineering, U. Maryland and U. Maryland Biotechnology Institute Biomaterials and bioMEMS
Gregory Payne Professor, U. Maryland Baltimore County and U. Maryland Biotechnology Institute Biomaterials and bioMEMS
Farhang Shadman Director, NSF Center for Environmentally Benign Semiconductor Manufacturing, and Professor, Dept. Chemical Engineering, and U. Arizona Environmental systems engineering and education
Mariano Anderle (Director)
Paolo Lazzeri
Division of Physics and Chemistry of Surfaces and Interfaces, ITC-IRST, Trento, Italy Materials and surface characterization for microelectronics and biotechnology
James Maslar
James Whetstone
NIST Chemical Science and Technology Laboratory Process measurements and characterization in advanced interconnect technology
Deborah Partlow
Michael Aumer
Darren Thomson
Northrop Grumman Advanced Technology Laboratory GaN MOCVD process, chemical sensing, equipment design, and modeling/simulation
Carl Gogol
Bob Ellefson
Inficon Inc. In-situ chemical process sensing
Jeffrey Herrmann Associate Professor, Dept. of Mechanical Engineering, Inst. for Systems Research, U. Maryland Integrated modeling and simulation of factory processes and operations
Ben Shneiderman Professor, Dept. of Computer Science, Inst. for Advanced Computer Studies, Inst. for Systems Research, U. Maryland Human-computer interactions and user interface design for engineered learning systems
Catherine Plaisant Associate Research Scientist, Dept. of Computer Science, Inst. for Advanced Computer Studies, U. Maryland Human-computer interactions and user interface design for engineered learning systems
John N. Kidder Assistant Professor, Vermont Technical College Semiconductor process and equipment, chemical sensing, process control