Dr. Gary W. Rubloff
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Process diagnostics, sensing, metrology, and control
Semiconductor manufacturing processes and equipment
Systems modeling, simulation, and optimization
Engineered learning systems

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All materials at this site are copyrighted © 2003 by the University of Maryland
1996-2003, all rights reserved
Research:
Semiconductor Manufacturing Processes and Equipment
Current
Chemical vapor deposition (CVD) for  semiconductor ULSI

 

Spatially programmable CVD for manufacturing uniformity, rapid process optimization,  and efficient materials discovery

Prior
Chemical mechanisms and film properties in CVD

 

Multichamber processing and analysis

Ultraclean, integrated MOS processing
and defect microchemistry

 

Metal/polymer interfaces and polymer surfaces

 

Metal/Si and silicide/Si interfaces