Dr. Gary W. Rubloff
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Research Topics
Process diagnostics, sensing, metrology, and control
Semiconductor manufacturing processes and equipment
Systems modeling, simulation, and optimization
Engineered learning systems

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All materials at this site are copyrighted 2003 by the University of Maryland
1996-2003, all rights reserved

Research:
Process Diagnostics, Sensing, Metrology, and Control
Current
 

Real-time, in-situ chemical sensing for reaction metrology in semiconductor processes

 

 

Advanced process control: course correction and fault management

Prior
 

Semiconductor materials and interface characterization

 

 

In-situ surface analysis

 

Optical studies of solids and surfaces