Dr. Gary W. Rubloff
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Research Topics
Process diagnostics, sensing, metrology, and control
Semiconductor manufacturing processes and equipment
Systems modeling, simulation, and optimization
Engineered learning systems

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All materials at this site are copyrighted 2003 by the University of Maryland
1996-2003, all rights reserved

Research:
Systems modeling, simulation, and optimization
Current
 

Dynamic simulation of semiconductor manufacturing equipment and process systems  

 

 

Integrating operational and process level behavior in semiconductor manufacturing

Prior
 

Optimizing semiconductor processes for environment and manufacturing