News
Parag Banerjee selected as Future Faculty Fellow |
After an impressive career start with six years' experience in industry at Micron Technology, Parag Banerjee came to UMD and our group to pursue an academic career as a professor. He is off to a great start, deeply involved in research, charging ahead in developing novel nanostructure devices for energy capture and storage based on new materials processing approaches, and working with a variety of faculty and students along the way. His talent and goals have been recognized in his selection for the Clark School's new Future Faculty Program, which prepares graduate students for professor positions. The program provides a supplementary stipend, special advising and seminars, and experiences in teaching and research mentoring. Parag is one of only 20 students from the Clark School to be chosen for the program. |
Susan Buckhout-White serves as MSE Teaching Fellow |
| Susan Buckhout-White is serving as an MSE Teaching Fellow in ENMA 465 during spring 2008. This provides her with experience in teaching as she considers its role in her future career. |
Rubloff serves on NSF Engineering Research Centers panel |
Professor Rubloff has been chosen to serve on the NSF Blue Ribbon Panel which evaluates and makes the final recommendations for the next group of NSF Engineering Research Centers (ERC's). The ERC program has been highly successful in stimulating a new breed of engineer since its inception in 1985. Rubloff served on a previous Blue Ribbon Panel in 2000. He has worked closely with the NSF ERC program, serving on Industrial Advisory Boards from IBM for ERC's at NCSU and Wisconsin, then as Associate Director of the NCSU ERC, and as Director of the UMD Institute for Systems Research (ISR), a former now-graduated ERC. A historical note: ISR was established from the Systems Research Center, an NSF ERC directed by Professor John Baras and awarded in the first such competition. Rubloff served as ISR's third Director, from 1996-2001. |
Nano-Bio Systems Laboratory (NBSL) established |
| Formerly the LAMP "annex", the laboratory in JM Patterson 2227 adjoining the LAMP lab has been converted to form the Nano-Bio Systems Laboratory (NBSL). It is home to a substantial research effort in biological microsystems (bioMEMS), supported by major grants from the Robert W. Deutsch Foundation and the NSF's Emerging Frontiers in Research and Innovation (EFRI) program, collaborative efforts involving Professors Bentley (BIOE & UMBI),, Ghodssi (ECE/ISR), Payne (UMBI), and Nan (UMB Pharmacy). The NBSL now contains equipment for microfluidics and bioMEMS assembly and testing. It houses a new Horiba Jobin-Yvon microRaman system, including fluorescence imaging capability, a Zeiss confocal/fluorescence microscope, and various systems for assembling bioMEMS devices to carry out and measure multistep biochemical reaction sequences. |
Research papers presented at 2007 AVS National Symposium |
The group presented 6 papers at the AVS National Symposium in Seattle Oct 14-19 2007. Nanomanufacturing & Nanometrology
BioMEMs
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Rubloff Group Welcomes newest member, Dean Berlin! |
Dean Berlin is the newest member in our group. Dean joins us as a graduate student in the BIOE program. He has a background in Materials Science, having obtained his Bachelors and Masters from MIT. He worked with Applied Materials, a giant semiconductor firm for 6 years before joining our group. Xiaolong successfully presented his PhD proposal in BIOE in March 2007. He is currently working on a microfluidics system with in-situ spatially programmable and control capabilities for use in biomolecule assemblies and for monitoring bioreaction processes. Parag Banerjee welcomed Parag Banerjee to the grouop in August 2006. Parag joins us as a graduate student in MSE. He has a Bachelors from IIT, Rookee (India) and Masters from Washington State University both in Materials Engineering. He worked with Micron Technology in Boise, Idaho for 6 years before joining our group.
Israel Perez was selected to go to Santiago, Chile in July 2006 for an NSF/DOE sponsored trip to attend the Pan American Advanced Studies Institute's (PASI) workshop in Transmission Electron Microscopy (TEM) in Materials Science, held at the Universidad de Chile in Santiago. Click here for the full scoop.
Israel Perez has won the Best Poster Award at the MEMS Alliance Special Topics Symposium, held Tuesday April 4, 2006 at Johns Hopkins University’s Applied Physics Laboratory. Izzy has been able to produce high-K dielectric nanotubes using ALD HfO2 onto Prof. Sang Bok Lee’s (Chemistry Department) nanoporous alumina templates.
Wei Lei finished his PhD in MSE in 2006 and has joined Novellus Systems in San Jose. His PhD research focused on atomic layer deposition (ALD) processes and prototype designs for ALD manufacturing equipment, and specifically on implementing real-time chemical sensing methods to identify operative surface chemistry and to enable advanced process control in ALD.
Yuhong (Joann) Cai completed her PhD in MSE in December 2005, then joined Intel's long-term research effort in Phoenix in 2006. Joann's research was centered on the development of spatially programmable chemical vapor deposition, and particularly the implementation of real-time mass spectrometry into this novel equipment design for chemical process monitoring and control.
U.S. patent 6,821,910 was issued Nov. 23, 2004 to Professors Ray Adomaitis, John Kidder and Gary Rubloff. It describes spatially programmable chemical vapor deposition and atomic layer deposition reactor designs for electronic materials processing, and particularly the key features of a gas delivery showerhead which incorporates segmented gas injection and exhaust gas recirculation through the showerhead. These concepts, developed as part of the NSF programmable reactor project, envision a new paradigm of intelligent reactors which are spatially programmability to enable robust uniformity and/or combinatorial process development, and which employ sensing and modeling to achieve new levels of process control.
Prof. Rubloff has been named to lead a new activity on campus, the Maryland NanoCenter. The NanoCenter is a partnership between engineering, physical sciences, and life sciences colleges at the University of Maryland. It is organized as a center within the Institute for Research in Electronics and Applied Physics (IREAP).
Soon Cho finished his PhD in MSE in spring 2004, receiving an A. James Clark School Fellowship for the semester. Soon's thesis covered his work at Northrop Grumman, centered on the application of real-time, in-situ chemical sensing for metrology and advanced process control in GaN MOCVD growth processes. The techniques and algorithms he developed are now used routinely in Northrop Grumman's processes, e.g., to control the thickness of a 20 nm AlGaN layer to 1%, which has a direct relation to device speed. His previous work on W CVD processes in LAMP were a strong basis for the Northrop Grumman work. Soon started a new position at Intel Corporation in Santa Clara, CA in fall 2004. |
