Facilities

LAMP: Laboratory for Advanced Materials Processing

J.M. Patterson 2225 (adjoining NBSL)
301 405-7250

The Laboratory for Advanced Materials Processing (LAMP) is a class 1000 clean room facility for semiconductor, MEMS, and bioMEMS fabrication, supporting materials and process research in chemical processes, sensors, and process control.

Click here to go to LAMP website.

LAMP: Laboratory for Advanced Materials Processing

Process equipment

Ultrahigh vacuum atomic layer deposition (UHV-ALD) system including mini-reactor ALD design, real-time downstream mass spectrometry, 4" wafer load lock, UHV construction. This system comprises an advanced testbed for ALD process development, supported strongly by MKS Instruments through equipment donations, graduate student support, and technical collaboration with MKS.

Hot wall furnace ALD system for real-time sensing, metrology, and process control in ALD. The system includes real-time downstream mass spectrometry and quartz crystal monitor instrumentation donated by Inficon, with whom we collaborate.

Spatially programmable/combinatorial CVD system with distributed flow gas impingement showerhead, multiplexed mass spectrometry, 4" wafer load lock.

Characterization equipment

Sopra GES 5E spectroscopic ellipsometry system with CCD parallel wavelength data acquisition, variable angle of incidence, wafer mapping, microspot focus capability.

Custom electrical characterization and wafer mapping system: LabView-automated mapping of capacitor devices (capacitance-voltage, current-voltage) and conducting/semiconducting thin films (sheet resistance by 4-point probe).

Leybold surface analysis system, comprising XPS, UPS, AES, SAM, SEM, and depth profiling capability.

NBSL: Nano-Bio Systems Laboratory

J.M. Patterson 2227 (adjoining LAMP)
301 405-0694

The Nano-Bio Systems Laboratory supports research in biomicrosystems (bioMEMS) and corresponding studies of biomaterials processing and in-situ diagnostics in bioMEMS.

Process equipment

Microfluidics technology, including LabView-controlled microfluidic flow control, electrodeposition of biopolymers in bioMEMS networks, biomolecular and cellular attachment within microfluidics.

Characterization equipment

Horiba Jobin-Yvon LabRAM HR-VIS microRaman system with 633nm, 532nm, and 785nm laser sources, Olympus microscope with fluorescence imaging capability.

Zeiss 310 optical microscope, including fluorescence and optical imaging and confocal 633nm imaging.

Zyvex L200 nanomanipulator system for biological applications in nano-bio and bioMEMS.

Perkin-Elmer Optima 4300DV ICP optical emission spectrometer.

Industry collaborators and support


We are happy to have enjoyed strong support from industry in the form of research and student support, equipment donations, and technical collaboration.

FabLab: Maryland NanoCenter's clean room fabrication facility

Jeong H. Kim Engineering Building 2310
301 405-0694

The FabLab is a professionally run large (10,000 sf) clean room with a full complement of process and metrology equipment used in a class 1000 environment. It features cutting edge nanofabrication tools as well as more conventional microfabrication equipment.

Click here to go to FabLab website

Beneq TFS-500 ALD system

We make extensive use of the state-of-art micro- and nano-fabrication faciltiies and associated metrology capability in the FabLab. This includes creation of biomicrofluidic systems for our bioMEMS research, nanostructure arrays for device configuration and testing, and standard test sites for electrical measurements of ALD and other materials.

NispLab: Maryland NanoCenter's electron microscopy facility

Jeong H. Kim Engineering Building 1237
301 405-7725

The NispLab is a professionally run electron microscopy facility with state-of-art structural and analytical TEM and SEM equipment.

Click here to go to NispLab website

Our group uses the NispLab on a regular basis for both structural and analytical microscopy in transmission electron microscopy (TEM) and scanning electron microscopy (SEM).

Collaborating Laboratories

We collaborate with several UMD research groups, sharing laboratory facilities with them. Among these are:

Professor Reza Ghodssi's MEMS Sensors and Actuators Laboratory (MSAL) for fabricating and testing MEMS and bioMEMS structures

Professor Michael Fuhrer's laboratory in the Department of Physics for growing carbon nanotubes and fabricating and measuring devices made from them.

Professor Sang Bok Lee's laboratory in the Department of Chemistry and Biochemistry for electrochemistry and particularly anodic aluminum oxide nanopore growth and functionalization.

Professor William Bentley and Gregory Payne's laboratory in the Plant Sciences Building is part of UMBI's Center for Biosystems Research in the Plant Sciences Building on the College Park campus. We use biochemical analysis instruments available in this lab.

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